- 专利标题: BEAM STEERING CORRECTION FOR ATTENUATING THE DEGRADATION OF POSITIONAL ACCURACY OF CHARGED PARTICLE AND LASER LIGHT BEAMS CAUSED BY MECHANICAL VIBRATIONS
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申请号: US17344134申请日: 2021-06-10
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公开(公告)号: US20210305009A1公开(公告)日: 2021-09-30
- 发明人: Amir Raveh , Gideon Reisfeld , Patrick Pardy
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01J37/153
- IPC分类号: H01J37/153 ; H01J37/12 ; H01J37/14 ; G02B26/08 ; H01J37/244
摘要:
An apparatus comprising a beam emitter to emit a beam comprising electrons, ions or laser-light photons toward a target substrate. A motion sensor to detect mechanical vibrations of the target substrate. The motion sensor is mechanically coupled to the target substrate, a processor coupled to an output of the motion sensor. The processor is to generate a vibration correction signal proportional to the mechanical vibrations detected by the motion sensor, and beam steering optics coupled to the processor. The beam steering optics are to deflect the beam according to the vibration correction signal to compensate for the mechanical vibrations of the target substrate.