公开(公告)号：US20210305009A1

公开(公告)日：2021-09-30

申请号：US17344134

申请日：2021-06-10

Applicant: Intel Corporation

Inventor： Amir Raveh ,  Gideon Reisfeld ,  Patrick Pardy

IPC: H01J37/153 ,  H01J37/12 ,  H01J37/14 ,  G02B26/08 ,  H01J37/244

Abstract: An apparatus comprising a beam emitter to emit a beam comprising electrons, ions or laser-light photons toward a target substrate. A motion sensor to detect mechanical vibrations of the target substrate. The motion sensor is mechanically coupled to the target substrate, a processor coupled to an output of the motion sensor. The processor is to generate a vibration correction signal proportional to the mechanical vibrations detected by the motion sensor, and beam steering optics coupled to the processor. The beam steering optics are to deflect the beam according to the vibration correction signal to compensate for the mechanical vibrations of the target substrate.

公开(公告)号：US20250004832A1

公开(公告)日：2025-01-02

申请号：US18216352

申请日：2023-06-29

Applicant: Intel Corporation

Inventor： Yoav Babajani ,  Efraim Rotem ,  Gideon Reisfeld ,  Somvir Singh Dahiya ,  Yevgeni Sabin

IPC: G06F9/48 ,  G06F1/26

Abstract: Techniques and mechanisms for determining a mode by which a processor is to be transitioned between power states. In one embodiment, circuitry selectively transitions power management of the processor to or from a limited power states (LPS) mode which, as compared to an alternative power management mode, makes a relatively limited number of two or more power states available to the processor. A transition to or from the LPS mode is performed based on a thermal condition such as one which is based on a skin temperature of a housing structure in which the processor is disposed. In another embodiment, transitions between the two or more power states is performed, during the LPS mode, based on a pendency of a software workload, or based on a completion of such a software workload.

公开(公告)号：US11664187B2

公开(公告)日：2023-05-30

申请号：US17344134

申请日：2021-06-10

Applicant: Intel Corporation

Inventor： Amir Raveh ,  Gideon Reisfeld ,  Patrick Pardy

IPC: H01J37/304 ,  H01J37/153 ,  H01J37/12 ,  H01J37/14 ,  G02B26/08 ,  H01J37/244 ,  H01J37/28 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J37/153 ,  G02B26/0816 ,  H01J37/12 ,  H01J37/14 ,  H01J37/244 ,  H01J37/304 ,  H01J37/28 ,  H01J37/3053 ,  H01J37/3174 ,  H01J2237/153 ,  H01J2237/24585

Abstract: An apparatus comprising a beam emitter to emit a beam comprising electrons, ions or laser-light photons toward a target substrate. A motion sensor to detect mechanical vibrations of the target substrate. The motion sensor is mechanically coupled to the target substrate, a processor coupled to an output of the motion sensor. The processor is to generate a vibration correction signal proportional to the mechanical vibrations detected by the motion sensor, and beam steering optics coupled to the processor. The beam steering optics are to deflect the beam according to the vibration correction signal to compensate for the mechanical vibrations of the target substrate.