Invention Application
- Patent Title: Nanosheet Device with Dipole Dielectric Layer and Methods of Forming the Same
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Application No.: US16835759Application Date: 2020-03-31
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Publication No.: US20210305400A1Publication Date: 2021-09-30
- Inventor: Chung-Wei Hsu , Kuo-Cheng Chiang , Lung-Kun Chu , Mao-Lin Huang , Jia-Ni Yu , Chih-Hao Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/06 ; H01L29/66 ; H01L21/02

Abstract:
Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises first semiconductor layers and second semiconductor layers over a substrate, wherein the first semiconductor layers and the second semiconductor layers are separated and stacked up, and a thickness of each second semiconductor layer is less than a thickness of each first semiconductor layer; a first interfacial layer around each first semiconductor layer; a second interfacial layer around each second semiconductor layer; a first dipole gate dielectric layer around each first semiconductor layer and over the first interfacial layer; a second dipole gate dielectric layer around each second semiconductor layer and over the second interfacial layer; a first gate electrode around each first semiconductor layer and over the first dipole gate dielectric layer; and a second gate electrode around each second semiconductor layer and over the second dipole gate dielectric layer.
Public/Granted literature
- US11374105B2 Nanosheet device with dipole dielectric layer and methods of forming the same Public/Granted day:2022-06-28
Information query
IPC分类: