- 专利标题： METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED DEVICES, METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES, AND APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES
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申请号： US16318052申请日： 2017-04-28
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公开(公告)号： US20210308725A1公开(公告)日： 2021-10-07
- 发明人: Jose Manuel DIEGUEZ-CAMPO , Stefan KELLER , Jae Won LEE , Takashi ANJIKI , Dieter HAAS
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 国际申请： PCT/EP2017/060239 WO 20170428
- 主分类号： B08B7/04
- IPC分类号： B08B7/04 ; B08B7/00 ; B08B3/08 ; B08B9/08 ; C23C14/12 ; C23C14/24 ; C23C14/56 ; H01L51/00 ; H01L51/56
摘要：
The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.
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