- 专利标题： ADAPTER, CONNECTION DEVICE AND SUPPLY SYSTEM
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申请号： US17388958申请日： 2021-07-29
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公开(公告)号： US20220037168A1公开(公告)日： 2022-02-03
- 发明人: Michael BRAUN , Simon SCHUTZBACH , Kader MEKIAS , Dinesh VIJAYARAGHAVAN , Orazio MONTESERRATO
- 申请人： SUSS MicroTec Lithography GmbH
- 申请人地址： DE Garching
- 专利权人： SUSS MicroTec Lithography GmbH
- 当前专利权人： SUSS MicroTec Lithography GmbH
- 当前专利权人地址： DE Garching
- 优先权： NL2026157 20200729
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; B05C11/10
摘要：
An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.