公开(公告)号：US20210402431A1

公开(公告)日：2021-12-30

申请号：US17359278

申请日：2021-06-25

申请人： SUSS MicroTec Lithography GmbH

发明人： Michael BRAUN ,  Simon SCHUTZBACH

IPC分类号： B05D3/04 ,  B05D7/26

摘要： A wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, has a process chamber having a process pot for treating the substrate, an air inlet for supplying air into the process chamber, at least one bypass outlet and at least one process pot outlet. The at least one bypass outlet and the at least one process pot outlet are air outlets for discharging air out of the process chamber. Furthermore, the at least one process pot outlet is provided in the process pot and the at least one bypass outlet is provided outside the process pot.

公开(公告)号：US20220037168A1

公开(公告)日：2022-02-03

申请号：US17388958

申请日：2021-07-29

申请人： SUSS MicroTec Lithography GmbH

发明人： Michael BRAUN ,  Simon SCHUTZBACH ,  Kader MEKIAS ,  Dinesh VIJAYARAGHAVAN ,  Orazio MONTESERRATO

IPC分类号： H01L21/67 ,  B05C11/10

摘要： An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.