公开(公告)号：US20220037168A1

公开(公告)日：2022-02-03

申请号：US17388958

申请日：2021-07-29

申请人： SUSS MicroTec Lithography GmbH

发明人： Michael BRAUN ,  Simon SCHUTZBACH ,  Kader MEKIAS ,  Dinesh VIJAYARAGHAVAN ,  Orazio MONTESERRATO

IPC分类号： H01L21/67 ,  B05C11/10

摘要： An adapter for a liquid container of a supply system of a wet process module for the treatment of substrates has a container part for fastening to the liquid container and a channel part for fastening to the supply system. The container part has a central opening and a fastening device for fastening the container part to the liquid container. The channel part has a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part.