Invention Application
- Patent Title: MICROPARTICLE ARRAYING MASK
-
Application No.: US17426446Application Date: 2020-01-24
-
Publication No.: US20220110217A1Publication Date: 2022-04-07
- Inventor: Akihiro SHIBATA , Masahiro NISHIMOTO , Yusuke TANAKA , Hirokazu ODAGIRI , Katsuhiro DOI
- Applicant: DEXERIALS CORPORATION
- Applicant Address: JP Tochigi
- Assignee: DEXERIALS CORPORATION
- Current Assignee: DEXERIALS CORPORATION
- Current Assignee Address: JP Tochigi
- Priority: JP2019-014278 20190130
- International Application: PCT/JP2020/002542 WO 20200124
- Main IPC: H05K3/34
- IPC: H05K3/34 ; H01L23/00

Abstract:
To prevent defects in microparticles from occurring in a case of arraying the microparticles having a diameter of less than or equal to 50 μm on a base material. Provided is a microparticle arraying mask for arraying microparticles having a diameter of less than or equal to 50 μm on a base material. The microparticle arraying mask has through-holes into which the microparticles are inserted. An opening plane of the through-holes on a microparticle supply side has an area smaller than an area of an opening plane of the through-holes on a microparticle discharge side. In a case of assuming that a direction from the opening plane on the microparticle supply side to the opening plane on the microparticle discharge side is a positive direction of a z-axis, and a sectional area of the through-holes vertical to the z-axis is A, dA(z)/dz>0 holds in a whole region in the through-holes along the z-axis, and Expression (1) below is satisfied: 0.4≤t/d≤1.0 (1).
Information query