Invention Application
- Patent Title: POLISHING AGENT REGENERATING METHOD AND POLISHING AGENT RECYCLE PROCESSING SYSTEM
-
Application No.: US17420621Application Date: 2019-12-24
-
Publication No.: US20220111489A1Publication Date: 2022-04-14
- Inventor: Keisuke MIZOGUCHI , Jing XUE , Fumiko TSUKIGATA , Akihiro MAEZAWA
- Applicant: Konica Minolta, Inc.
- Applicant Address: JP Tokyo
- Assignee: Konica Minolta, Inc.
- Current Assignee: Konica Minolta, Inc.
- Current Assignee Address: JP Tokyo
- Priority: JP2019-002337 20190110
- International Application: PCT/JP2019/050487 WO 20191224
- Main IPC: B24B57/02
- IPC: B24B57/02 ; C09G1/04 ; B01D21/24

Abstract:
A polishing agent regenerating method in which a component of a polished material is removed from polishing agent slurry and a polishing agent is collected and regenerated is shown. The method includes at least, polishing, polishing agent slurry supplying, polishing agent slurry collecting, and sedimenting/separating/concentrating, performed in the above order. In the polishing agent slurry collecting or the sedimenting/separating/concentrating, a K2O density in the polishing agent slurry after dilution by water is performed is to be within a range of 0.002-0.2 mass %.
Information query