POLISHING SYSTEM
    1.
    发明公开
    POLISHING SYSTEM 审中-公开

    公开(公告)号:US20230191554A1

    公开(公告)日:2023-06-22

    申请号:US17921391

    申请日:2021-04-12

    CPC classification number: B24B37/013

    Abstract: A polishing system performs chemical-mechanical polishing of an object to be polished using an abrasive slurry. The polishing system includes a polishing amount calculator that measures an amount of free metal ions of a metallic element derived from the object to be polished in a processed slurry and calculates a polishing amount of the object to be polished from the amount of the free metal ions. The object to be polished is a glass containing the metallic element of Group 1 or Group 2 of a periodic table.

    Polishing Material Particles, Method For Producing Polishing Material, And Polishing Processing Method
    2.
    发明申请
    Polishing Material Particles, Method For Producing Polishing Material, And Polishing Processing Method 有权
    抛光材料颗粒,抛光材料的制造方法和抛光加工方法

    公开(公告)号:US20160194538A1

    公开(公告)日:2016-07-07

    申请号:US14910986

    申请日:2014-07-28

    Abstract: Disclosed are polishing material particles which have polishing performance suitable for precision polishing and also have a high polishing speed and high monodispersibility; a polishing material containing the polishing material particles; and a polishing processing method using the polishing material. The polishing material particles are spherical particles having an average aspect ratio of 1.00 to 1.15, wherein the particle diameter (D50 (nm)) of the polishing material particles as determined from a particle diameter cumulative distribution curve falls within the range from 50 to 1500 nm. The average content of cerium or the total content of cerium and at least one element selected from lanthanum (La), praseodymium (Pr), neodymium (Nd), samarium (Sm) and europium (Eu) in the polishing material particles is 81 mol % or more relative to the total content of all of rare earth elements that constitute the polishing material particles.

    Abstract translation: 公开了具有适合于精密抛光的抛光性能并且还具有高抛光速度和高单分散性的抛光材料颗粒; 包含抛光材料颗粒的抛光材料; 以及使用研磨材料的研磨处理方法。 抛光材料颗粒是平均纵横比为1.00至1.15的球形颗粒,其中由粒径累积分布曲线确定的抛光材料颗粒的粒径(D50(nm))落在50至1500nm的范围内 。 在研磨材料颗粒中,铈的平均含量或铈和至少一种选自镧(La),镨(Pr),钕(Nd),钐(Sm)和铕(Eu)的元素的含量为81mol 相对于构成抛光材料颗粒的所有稀土元素的总含量为%以上。

    PREPARATION METHOD OF RECYCLED POLISHING AGENT SLURRY AND POLISHING AGENT SLURRY

    公开(公告)号:US20220356372A1

    公开(公告)日:2022-11-10

    申请号:US17658574

    申请日:2022-04-08

    Abstract: A recycled polishing agent slurry is prepared from a used polishing agent slurry after polishing a silicon material using a reference polishing agent slurry including a cerium oxide polishing agent and a dispersing agent. The preparation method includes: slurry collecting in which the used slurry discharged from a polishing machine is collected; separation and concentration in which the cerium oxide polishing agent in the collected slurry is separated from a component derived from the material to be polished and then concentrated, and polishing agent recycling in which a pH adjusting agent and the dispersing agent are added to the separated and concentrated cerium oxide polishing agent, and a recycled polishing agent slurry is adjusted to have a pH value at 25° C. of in a range of 6.0 to 10.5 and an electrical conductivity value in a range of 0.10 to 10.00 times that of the reference slurry.

    Quality Inspection Method
    6.
    发明申请

    公开(公告)号:US20210109038A1

    公开(公告)日:2021-04-15

    申请号:US16500120

    申请日:2018-03-30

    Abstract: Provided is a quality inspection method in which an inner state of a three-dimensional laminated molding can be quickly and easily inspected without destroying the three-dimensional laminated molding. To this end, the quality inspection method uses an X-ray Talbot imaging system 1 which creates a reconstructed image of an inspection object on the basis of a moire image obtained by using an X-ray detector to read X-rays which, after being radiated from an X-ray source 11a, have passed through: a plurality of grids in which a plurality of slits S are arranged in a direction perpendicular to the radiation axis direction of the X-ray; and an inspection object H placed on a subject table 13. The inspection object H is a three-dimensional laminated molding formed into a three-dimensional shape by laminating multiple layers of constituent materials. The reconstructed image is created while the inspection object H is placed on the subject table 13 in such a way that at least the lamination direction of layers constituting the inspection object H and the arrangement direction of the plurality of slits S in the plurality of grids are parallel. The inner state of the inspection object H is inspected on the basis of the reconstructed image.

    Core/Shell-Type Inorganic Particles
    9.
    发明申请
    Core/Shell-Type Inorganic Particles 审中-公开
    核/壳型无机颗粒

    公开(公告)号:US20150353795A1

    公开(公告)日:2015-12-10

    申请号:US14763070

    申请日:2014-01-22

    Abstract: An object of the present invention is to provide an inorganic core/shell particle to be contained in an abrasive material that contains a reduced amount of cerium, can polish harder workpieces at a high polishing rate, and can decrease the surface roughness of the workpieces. The inorganic core/shell particle P of the present invention is to be contained in an abrasive material and includes a core (1) containing a salt of at least one element selected from yttrium (Y), titanium (Ti), strontium (Sr), barium (Ba), samarium (Sm), europium (Eu), gadolinium (Gd), and terbium (Tb) and a shell (2) containing a salt of at least one element selected from these eight elements and a salt of cerium (Ce), wherein the crystallites in the shell (2) have an average diameter within a range of 4 to 30 nm.

    Abstract translation: 本发明的目的在于提供一种含有少量铈的研磨材料的无机核/壳粒子,能够以高抛光速度对较硬的工件进行抛光,能够降低工件的表面粗糙度。 本发明的无机核/壳粒子P包含在研磨材料中,并且包括含有选自钇(Y),钛(Ti),锶(Sr) ,钡(Ba),钐(Sm),铕(Eu),钆(Gd)和铽(Tb)和含有选自这八元素中的至少一种元素的盐的壳(2) (Ce),其中壳(2)中的微晶的平均直径在4〜30nm的范围内。

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