- 专利标题: TRAP FILTER SYSTEM FOR SEMICONDUCTOR EQUIPMENT
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申请号: US17557051申请日: 2021-12-21
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公开(公告)号: US20220112598A1公开(公告)日: 2022-04-14
- 发明人: Subramani IYER , Kaushal SINGH
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23C16/44
- IPC分类号: C23C16/44 ; H01L21/67 ; B01D53/82 ; B01D53/38
摘要:
The present disclosure is directed to a trap filter system having a plurality of filters, the plurality of filters having filtering materials to remove contaminants from a flow of gas effluents generated by a semiconductor processing tool and a bypass mechanism configured to selectively direct or shut off the flow of gas effluents to one or more of the plurality of filters while the semiconductor processing tool remains in operation. Each of the plurality of filters is removable and replaceable when the filtering material is unable to effectuate the removal of contaminants.
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