Invention Application
- Patent Title: MULTILAYER INSULATOR STACK FOR FERROELECTRIC TRANSISTOR AND CAPACITOR
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Application No.: US17551899Application Date: 2021-12-15
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Publication No.: US20220123151A1Publication Date: 2022-04-21
- Inventor: Uygar E. Avci , Joshua M. Howard , Seiyon Kim , Ian A. Young
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L49/02 ; H01L29/51

Abstract:
Described is an apparatus which comprises: a first layer comprising a semiconductor; a second layer comprising an insulating material, the second layer adjacent to the first layer; a third layer comprising a high-k insulating material, the third layer adjacent to the second layer; a fourth layer comprising a ferroelectric material, the fourth layer adjacent to the third layer; and a fifth layer comprising a high-k insulating material, the fifth layer adjacent to the fourth layer.
Public/Granted literature
- US11799029B2 Multilayer insulator stack for ferroelectric transistor and capacitor Public/Granted day:2023-10-24
Information query
IPC分类: