Invention Application
- Patent Title: MULTI-COMPARTMENT ELECTROCHEMICAL REPLENISHMENT CELL
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Application No.: US17078413Application Date: 2020-10-23
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Publication No.: US20220127747A1Publication Date: 2022-04-28
- Inventor: Nolan L. Zimmerman , Charles Sharbono , Gregory J. Wilson , Paul R. McHugh , Paul Van Valkenburg , Deepak Saagar Kalaikadal , Kyle M. Hanson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C25D17/10
- IPC: C25D17/10 ; C25D17/00 ; C25D21/12

Abstract:
Electroplating systems may include an electroplating chamber. The systems may also include a replenish assembly fluidly coupled with the electroplating chamber. The replenish assembly may include a first compartment housing anode material. The first compartment may include a first compartment section in which the anode material is housed and a second compartment section separated from the first compartment section by a divider. The replenish assembly may include a second compartment fluidly coupled with the electroplating chamber and electrically coupled with the first compartment. The replenish assembly may also include a third compartment electrically coupled with the second compartment, the third compartment including an inert cathode.
Public/Granted literature
- US11697887B2 Multi-compartment electrochemical replenishment cell Public/Granted day:2023-07-11
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