Invention Application
- Patent Title: PLACEMENT TABLE, TESTING DEVICE, AND TESTING METHOD
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Application No.: US17508232Application Date: 2021-10-22
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Publication No.: US20220128624A1Publication Date: 2022-04-28
- Inventor: Shigeru KASAI , Tomohiro OTA
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2020-180451 20201028
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01K13/00 ; G01K7/01 ; G01K7/18

Abstract:
There is provided a placement table having an upper surface on which a device to be processed is placed. The placement table comprises: a top plate having a placement surface for the device; a heating unit configured to heat the top plate; a plurality of temperature sensors configured to acquire temperature of the top plate at desired measurement positions in a plan view; and a positioning unit electrically connected to the temperature sensors and configured to position the temperature sensors at the measurement positions in a plan view. The positioning unit is formed of a flexible substrate having flexibility.
Public/Granted literature
- US11828794B2 Placement table, testing device, and testing method Public/Granted day:2023-11-28
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