Invention Application
- Patent Title: TRANSPORT SYSTEM
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Application No.: US17647120Application Date: 2022-01-05
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Publication No.: US20220130700A1Publication Date: 2022-04-28
- Inventor: Jacob NEWMAN , Ulrich OLDENDORF , Martin AENIS , Andrew J. CONSTANT , Shay ASSAF , Jeffrey C. HUDGENS , Alexander BERGER , William Tyler WEAVER
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G47/92 ; H01L21/67 ; H01L21/687
Abstract:
Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.
Public/Granted literature
- US11894251B2 Transport system Public/Granted day:2024-02-06
Information query
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