- 专利标题: Multi-Modal Wide-Angle Illumination Employing a Compound Beam Combiner
-
申请号: US17441279申请日: 2020-07-09
-
公开(公告)号: US20220155574A1公开(公告)日: 2022-05-19
- 发明人: David Fisch , Avraham Adler , Ilia Lutsker , Yigal Katzir , Avinoam Rosenberg
- 申请人: Orbotech Ltd.
- 申请人地址: IL Yavne
- 专利权人: Orbotech Ltd.
- 当前专利权人: Orbotech Ltd.
- 当前专利权人地址: IL Yavne
- 国际申请: PCT/IL2020/050765 WO 20200709
- 主分类号: G02B19/00
- IPC分类号: G02B19/00 ; G02F1/29 ; G02B3/08 ; G02B21/36 ; G02B26/08
摘要:
Provided is an optical apparatus that includes an illumination assembly which include an extended radiation source emitting radiation with a controllable spatial distribution and telecentric condensing optics, configured to receive and project the emitted radiation with a numerical aperture exceeding 0.3 along a first optical axis onto a field and an imaging assembly that includes a sensor and objective optics configured to image the field along a second optical axis onto the sensor and also a prism combiner positioned between the field and the condensing and objective optics which is configured to combine the first and second optical axes, while reflecting at least one of the optical axes multiple times within the prism combiner.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B19/00 | 聚光镜(用于显微镜的入G02B21/08) |