Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
-
Application No.: US17665979Application Date: 2022-02-07
-
Publication No.: US20220157851A1Publication Date: 2022-05-19
- Inventor: Go OIKE , Tsuyoshi SUGISAKI
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2018-046940 20180314
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L27/11556 ; H01L27/11524 ; G11C5/06 ; H01L27/11565 ; G11C16/04 ; G11C16/08 ; H01L27/11519

Abstract:
According to one embodiment, a semiconductor memory device includes a plurality of first interconnect layers, first and second memory pillars, and a plurality of first plugs. The plurality of first interconnect layers include a first array region where the first memory pillar penetrates the plurality of first interconnect layers, a second array region where the second memory pillar penetrates the plurality of first interconnect layers, and a coupling region where a plurality of coupling parts respectively coupled to the plurality of first plugs are formed. Along a first direction parallel to the semiconductor substrate, the first array region, the coupling region, and the second array region are arranged in order.
Public/Granted literature
- US11818890B2 Semiconductor memory device Public/Granted day:2023-11-14
Information query
IPC分类: