Invention Application
- Patent Title: Method and Apparatus for Pulse Gas Delivery with Pressure Control
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Application No.: US17455626Application Date: 2021-11-18
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Publication No.: US20220161288A1Publication Date: 2022-05-26
- Inventor: Junhua Ding , Michael L'Bassi
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Main IPC: B05B12/06
- IPC: B05B12/06 ; H01L21/67
Abstract:
Pulsed gas delivery is obtained with mass flow control using a thermal mass flow sensor and control valve. The controller is augmented for pressure control with a downstream pressure sensor. In separate control modes of operation, the control valve is controlled in response to the flow sensor during pulse gas delivery mode and controlled in response to the downstream pressure sensor during pressure control mode of operation.
Information query
