Invention Application
- Patent Title: VACUUM PUMP
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Application No.: US17436426Application Date: 2020-03-09
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Publication No.: US20220163053A1Publication Date: 2022-05-26
- Inventor: Hideki Enosawa , Manabu Nonaka , Yasushi Maejima , Tsutomu Takaada
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Priority: JP2019-045825 20190313
- International Application: PCT/JP2020/009951 WO 20200309
- Main IPC: F04D29/66
- IPC: F04D29/66 ; F04D19/04 ; F04D29/38 ; F04D29/64

Abstract:
A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.
Public/Granted literature
- US12044251B2 Vacuum pump Public/Granted day:2024-07-23
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