发明申请
- 专利标题： ELECTROCHEMICAL DEPOSITION APPARATUS SET AND ELECTROCHEMICAL DEPOSITION METHOD
-
申请号： US17488234申请日： 2021-09-28
-
公开(公告)号： US20220170152A1公开(公告)日： 2022-06-02
- 发明人: Guangcai YUAN , Junwei YAN , Chengfei WANG , Guocai ZHANG , Shihao DONG , Shaodong SUN , Qi QI , Zhanfeng CAO
- 申请人： BOE TECHNOLOGY GROUP CO., LTD.
- 申请人地址： CN Beijing
- 专利权人： BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人： BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人地址： CN Beijing
- 优先权： CN202011367346.7 20201127
- 主分类号： C23C16/44
- IPC分类号： C23C16/44 ; C23C16/458
摘要：
The present disclosure provides an electrochemical deposition apparatus set. The electrochemical deposition apparatus set includes: an electrochemical deposition device configured to form an electrochemical deposition film layer on an area to be coated of a substrate; an antioxidation treatment device located on a side of the electrochemical deposition device and configured to performing antioxidation treatment on the substrate formed with the electrochemical deposition film layer; a transmission device configured to carry the substrate and drive the substrate to move at least from the electrochemical deposition device to the antioxidation treatment device.
信息查询
IPC分类:
