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公开(公告)号：US20220098752A1
公开(公告)日：2022-03-31
申请号：US17398980
申请日：2021-08-10
发明人： Guangcai YUAN , Junwei YAN , Shaodong SUN , Guocai ZHANG , Shihao DONG , Chengfei WANG , Pengcheng DONG , Qi QI
IPC分类号： C25D21/06
摘要： A debris cleaning device includes: a process treatment tank for containing a liquid medicine and a substrate to be treated, wherein the bottom of the tank body of the process treatment tank is provided with a liquid medicine discharge port, and the side wall of the tank body of the process treatment tank is provided with a liquid medicine inlet port; and a self-circulation debris removal system, the self-circulation debris removal system comprising a circulation pipeline communicating between the liquid medicine discharge port and the liquid medicine inlet port, the circulation pipeline being provided with a control valve for controlling the on-off state of the circulation pipeline, a debris filtering and collecting device for filtering the debris in the circulation pipeline, and a power pump for providing circulation driving force for the liquid medicine in the circulation pipeline.
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公开(公告)号：US20220238391A1
公开(公告)日：2022-07-28
申请号：US17483613
申请日：2021-09-23
发明人： Shaodong SUN , Haoran GAO , Guangcai YUAN , Lilei ZHANG , Wenyue FU , Li LI , Hanbo ZHENG , Shuqi LIU , Qi QI , Junwei YAN , Pingkuan GU , Lina JING , Yan CHEN , Yimin CHEN
摘要： The present disclosure relates to a device and a system for testing flatness. The device for testing flatness includes a base, a testing platform, and a ranging sensor. The testing platform is assembled on the base. The testing platform includes a supporting structure. The supporting structure is disposed on the side of the testing platform away from the base and is used to support a to-be-tested board. The structure matches the structure of the to-be-tested board. The ranging sensor is disposed on the side of the testing platform away from the base. After the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2. According to the embodiments of the present disclosure, the flatness of the glass substrate can be tested to improve the manufacturing process to reduce the flatness of the glass substrate, and avoid the problem that the glass substrate is easily broken when entering the subsequent process equipment and the process equipment is down.
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公开(公告)号：US20220170174A1
公开(公告)日：2022-06-02
申请号：US17516236
申请日：2021-11-01
发明人： Chengfei WANG , Junwei YAN , Guangcai YUAN , Shaodong SUN , Guocai ZHANG , Shihao DONG , Pengcheng DONG
摘要： The present disclosure provides a carrier liquid leakage preventing device and an electrochemical deposition apparatus. The carrier liquid leakage preventing device is used for containing liquid medicine dripping from a carrier; the carrier liquid leakage preventing device comprises: a guide rail disposed along a first direction, the first direction is a vertical direction perpendicular to the horizontal plane or a direction at an angle to the horizontal plane; a leakage preventing groove provided on the guide rail and capable of performing a lifting movement along the guide rail so as to move above or below the carrier; and a driver for driving the lifting movement of the leakage preventing groove.
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公开(公告)号：US20220170152A1
公开(公告)日：2022-06-02
申请号：US17488234
申请日：2021-09-28
发明人： Guangcai YUAN , Junwei YAN , Chengfei WANG , Guocai ZHANG , Shihao DONG , Shaodong SUN , Qi QI , Zhanfeng CAO
IPC分类号： C23C16/44 , C23C16/458
摘要： The present disclosure provides an electrochemical deposition apparatus set. The electrochemical deposition apparatus set includes: an electrochemical deposition device configured to form an electrochemical deposition film layer on an area to be coated of a substrate; an antioxidation treatment device located on a side of the electrochemical deposition device and configured to performing antioxidation treatment on the substrate formed with the electrochemical deposition film layer; a transmission device configured to carry the substrate and drive the substrate to move at least from the electrochemical deposition device to the antioxidation treatment device.
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公开(公告)号：US20220170173A1
公开(公告)日：2022-06-02
申请号：US17401167
申请日：2021-08-12
发明人： Shihao DONG , Junwei YAN , Guocai ZHANG , Chengfei WANG , Shaodong SUN , Pengcheng DONG
摘要： A substrate carrier includes: a carrier body, wherein the carrier body includes at least one carrying surface, and a first conductive sheet is provided on the carrying surface; a cover plate, wherein the cover plate is a frame structure with a hollow interior, the cover plate is opposite to the carrying surface and is detachably fixed on the carrying surface, the shape of the frame structure matches the shape of a substrate to be coated, the cover plate includes an inner side surface facing the carrying surface, and a second conductive sheet is provided on the inner side surface; an elastic connector is provided between the first conductive sheet and the second conductive sheet, and when the substrate to be coated is fixed on the carrying surface, the second conductive sheet is respectively in electrical communication with the conductive film layer and the first conductive sheet via the elastic connector.
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公开(公告)号：US20220097010A1
公开(公告)日：2022-03-31
申请号：US17409013
申请日：2021-08-23
发明人： Shaodong SUN , Junwei YAN , Guangcai YUAN , Guocai ZHANG , Shihao DONG , Lilei ZHANG , Haoran GAO , Wenyue FU , Chengfei WANG , Xiaojie PAN
摘要： The present disclosure provides a gas-solid separation structure including: a feeding pipeline including a first feeding part, a second feeding part and a first valve disposed between the first and second feeding parts; a discharge pipeline having a first opening and a second opening opposite to each other, the second feeding part extending into the discharge pipeline via the first opening; wherein an exhaust channel is formed between the second feeding part and the discharge pipeline, exhaust holes are formed in a portion of the discharge pipeline opposite to the second feeding part, and the exhaust channel is in communication with the exhaust holes. The present disclosure further provides a feeding device and an electrochemical deposition apparatus. The present disclosure can improve the problem of interference with medicine powder release caused by gases entering the discharge pipeline.
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公开(公告)号：US20220290321A1
公开(公告)日：2022-09-15
申请号：US17514971
申请日：2021-10-29
发明人： Guocai ZHANG , Junwei YAN , Shihao DONG , Shaodong SUN , Chengfei WANG
摘要： The present disclosure relates to a filling device and apparatus, an electrochemical deposition system, and a filling method. The filling device includes: a feeding structure including a first feed port and a first discharge port; a container including a second feed port and a second discharge port; a weighing means disposed on the container; a conveying structure disposed between the first discharge port and the second feed port, the second feed port being in communication with the first discharge port via the conveying structure, and the conveying structure being configured to convey a material output from the first discharge port to the second feed port; and a control structure connected to the weighing means and the conveying structure, respectively, and configured to control a conveying speed of the conveying structure according to the weight detected by the weighing means.
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公开(公告)号：US20220250870A1
公开(公告)日：2022-08-11
申请号：US17631090
申请日：2021-04-09
发明人： Shuqi LIU , Xinhong LU , Wenyue FU , Haoran GAO , Guangcai YUAN , Li LI , Shaodong SUN , Song FANG , Dongfeng DU , Qi QI
摘要： A folding device is provided, The folding device includes a bearing and fixing mechanism (1) configured to bear and fix a main body portion (21) of a to-be-folded device (2); a folding mechanism (3) located on at least one side of the bearing and fixing mechanism (1), the folding mechanism (3) being rotatably connected to the bearing and fixing mechanism (1) and configured to bear and fix a to-be-folded portion (22) of the to-be-folded device (2); and a driving mechanism (4) connected to the folding mechanism (3), the driving mechanism (4) being configured to drive the folding mechanism (3) to turn relative to the bearing and fixing mechanism (1), so as to fold the to-be-folded portion (22) to a side in a thickness direction of the main body portion (21), The folding device can fold automatically, and manual folding is avoided.
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公开(公告)号：US20220236005A1
公开(公告)日：2022-07-28
申请号：US17475021
申请日：2021-09-14
发明人： Guocai ZHANG , Junwei YAN , Shaodong SUN , Shihao DONG , Yingwei LIU , Zhanfeng CAO , Guangcai YUAN
摘要： The present disclosure provides an air drying device including: a base including opposing top and bottom portions, the top portion including at least one first bearing surface; and at least one bearing plate disposed at the top portion of the base. The bearing plate includes a second bearing surface, and the first bearing surface is inclined relative to the second bearing surface.
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公开(公告)号：US20220168888A1
公开(公告)日：2022-06-02
申请号：US17516269
申请日：2021-11-01
发明人： Chengfei WANG , Junwei YAN , Guangcai YUAN , Shaodong SUN , Guocai ZHANG , Shihao DONG , Pengcheng DONG
摘要： The present application relates to a substrate transfer device, comprising a horizontally arranged cross beam, and support beams longitudinally arranged at two ends of the cross beam, wherein a substrate carrier is suspended on the cross beam, the substrate carrier is located between the two support beams, and the substrate carrier is parallel to a plane where the two support beams are located, the substrate carrier comprises two side walls oppositely arranged in a horizontal direction, and each of the support beams is provided with an auxiliary clamping structure for clamping the substrate carrier during transferring of the substrate carrier.
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