- 专利标题: MULTI-INPUT MULTI-ZONE THERMAL CONTROL FOR DEVICE TESTING
-
申请号: US17531463申请日: 2021-11-19
-
公开(公告)号: US20220206061A1公开(公告)日: 2022-06-30
- 发明人: Karthik Ranganathan , Gregory Cruzan , Paul Ferrari , Samer Kabbani , Martin Fischer
- 申请人: Advantest Test Solutions, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Advantest Test Solutions, Inc.
- 当前专利权人: Advantest Test Solutions, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G05B15/02
摘要:
Disposing a DUT between a cold plate and an active thermal interposer device of the thermal management head. The DUT includes a plurality of modules and the active thermal interposer device includes a plurality of zones, each zone of the plurality of zones corresponding to a respective module of the plurality of modules and operable to be selectively heated. Receiving a respective set of inputs corresponding to each zone of the plurality of zones. Performing thermal management of the plurality of modules of the DUT by separately controlling temperature of each zone of the plurality zones by controlling a supply of coolant to a cold plate, and individually controlling heating of each zone of the plurality zones.
公开/授权文献
- US11573262B2 Multi-input multi-zone thermal control for device testing 公开/授权日:2023-02-07
信息查询