Invention Application
- Patent Title: CHUCK PIN ASSEMBLY, AND SUBSTRATE HOLDING APPARATUS AND LIQUID PROCESSING APPARATUS INCLUDING SAME
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Application No.: US17554972Application Date: 2021-12-17
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Publication No.: US20220208596A1Publication Date: 2022-06-30
- Inventor: Cheol Hwan JEONG
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR10-2020-0183644 20201224
- Main IPC: H01L21/687
- IPC: H01L21/687
Abstract:
A chuck pin assembly includes a body member provided on a circumferential portion of a chuck supporting a substrate and configured to be movable with respect to the chuck, a grip member gripping a lateral portion of the substrate, and a rotational connection member rotatably coupling the grip member to the body member. As the grip member is rotatable, it is possible to prevent the chuck pin from being worn at a specific portion which contacts the substrate, and to improve the life of the chuck pin.
Information query
IPC分类:
