Invention Application
- Patent Title: Pressure Sensor Device and Method for Forming a Pressure Sensor Device
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Application No.: US17708407Application Date: 2022-03-30
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Publication No.: US20220221363A1Publication Date: 2022-07-14
- Inventor: Jörg Siegert , Willem Frederik Adrianus Besling , Coenraad Cornelis Tak , Martin Schrems , Franz Schrank
- Applicant: Sciosense B.V.
- Applicant Address: NL AE Eindhoven
- Assignee: Sciosense B.V.
- Current Assignee: Sciosense B.V.
- Current Assignee Address: NL AE Eindhoven
- Priority: EP16191894.1 20160930,EP16196616.3 20161031
- Main IPC: G01L19/14
- IPC: G01L19/14 ; G01L9/00 ; G01L19/04 ; G01L7/08 ; G01L9/12
Abstract:
In an embodiment a method for forming a pressure sensor device includes providing a pressure sensor on a substrate body, the pressure sensor comprising a membrane, depositing a top layer on top of the substrate body and the pressure sensor, connecting a cap body with the top layer, a mass of the cap body being approximately equal to a mass of the substrate body and introducing at least one opening in the cap body.
Information query
