Invention Application
- Patent Title: CROSS-POINT MAGNETORESISTIVE RANDOM MEMORY ARRAY AND METHOD OF MAKING THEREOF USING SELF-ALIGNED PATTERNING
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Application No.: US17654762Application Date: 2022-03-14
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Publication No.: US20220223649A1Publication Date: 2022-07-14
- Inventor: Lei WAN , Jordan KATINE , Tsai-Wei WU
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/12 ; H01L43/02

Abstract:
A memory device includes a cross-point array of magnetoresistive memory cells. Each magnetoresistive memory cell includes a vertical stack of a selector-containing pillar structure and a magnetic tunnel junction pillar structure. The lateral spacing between neighboring pairs of magnetoresistive memory cells may be smaller along a first horizontal direction than along a second horizontal direction, and a dielectric spacer or a tapered etch process may be used to provide a pattern of an etch mask for patterning first electrically conductive lines underneath the magnetoresistive memory cells. Alternatively, a resist layer may be employed to pattern first electrically conductive lines underneath the cross-point array. Alternatively, a protective dielectric liner may be provided to protect selector-containing pillar structures during formation of the magnetic tunnel junction pillar structures.
Public/Granted literature
- US12004356B2 Cross-point magnetoresistive random memory array and method of making thereof using self-aligned patterning Public/Granted day:2024-06-04
Information query
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