Invention Application
- Patent Title: DUAL PORE SENSORS
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Application No.: US17617153Application Date: 2020-04-15
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Publication No.: US20220236250A1Publication Date: 2022-07-28
- Inventor: Joseph R. JOHNSON , Roger QUON , Archana KUMAR , Ryan Scott SMITH , Jeremiah HEBDING , Raghav SREENIVASAN
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/US2020/028283 WO 20200415
- Main IPC: G01N33/487
- IPC: G01N33/487

Abstract:
Embodiments of the present disclosure provide methods of forming solid state dual pore sensors which may be used for biopolymer sequencing and dual pore sensors formed therefrom. In one embodiment, a dual pore sensor features a substrate having a patterned surface comprising two recessed regions spaced apart by a divider wall and a membrane layer disposed on the patterned surface. The membrane layer, the divider wall, and one or more surfaces of each of the two recessed regions collectively define a first fluid reservoir and a second fluid reservoir. A first nanopore is disposed through a portion of the membrane layer disposed over the first fluid reservoir and a second nanopore is disposed through a portion of the membrane layer disposed over the second fluid reservoir. Herein, opposing surfaces of the divider wall are sloped to each form an angle of less than 90° with a respective reservoir facing surface of the membrane layer.
Information query