公开(公告)号：US20220242725A1

公开(公告)日：2022-08-04

申请号：US17617151

申请日：2020-04-15

Applicant: Applied Materials, Inc.

Inventor： Joseph R. JOHNSON ,  Roger QUON ,  Archana KUMAR ,  Ryan Scott SMITH ,  Jeremiah HEBDING ,  Raghav SREENIVASAN

IPC: B82B3/00 ,  B81C1/00 ,  B82Y15/00 ,  B82Y40/00

Abstract: Embodiments of the present disclosure provide methods of forming solid state dual pore sensors which may be used for biopolymer sequencing and dual pore sensors formed therefrom. In one embodiment, a method of forming a dual pore sensor includes providing a pattern in a surface of a substrate. Generally, the pattern features two fluid reservoirs separated by a divider wall. The method further includes depositing a layer of sacrificial material into the two fluid reservoirs, depositing a membrane layer, patterning two nanopores through the membrane layer, removing the sacrificial material from the two fluid reservoirs, and patterning one or more fluid ports and a common chamber.

公开(公告)号：US20220236250A1

公开(公告)日：2022-07-28

申请号：US17617153

申请日：2020-04-15

Applicant: Applied Materials, Inc.

Inventor： Joseph R. JOHNSON ,  Roger QUON ,  Archana KUMAR ,  Ryan Scott SMITH ,  Jeremiah HEBDING ,  Raghav SREENIVASAN

IPC: G01N33/487

Abstract: Embodiments of the present disclosure provide methods of forming solid state dual pore sensors which may be used for biopolymer sequencing and dual pore sensors formed therefrom. In one embodiment, a dual pore sensor features a substrate having a patterned surface comprising two recessed regions spaced apart by a divider wall and a membrane layer disposed on the patterned surface. The membrane layer, the divider wall, and one or more surfaces of each of the two recessed regions collectively define a first fluid reservoir and a second fluid reservoir. A first nanopore is disposed through a portion of the membrane layer disposed over the first fluid reservoir and a second nanopore is disposed through a portion of the membrane layer disposed over the second fluid reservoir. Herein, opposing surfaces of the divider wall are sloped to each form an angle of less than 90° with a respective reservoir facing surface of the membrane layer.