公开(公告)号：US20210215664A1

公开(公告)日：2021-07-15

申请号：US16738629

申请日：2020-01-09

Applicant: Applied Materials, Inc.

Inventor： Mark J. SALY ,  Keenan Navarre WOODS ,  Joseph R. JOHNSON ,  Bhaskar Jyoti BHUYAN ,  William J. DURAND ,  Michael CHUDZIK ,  Raghav SREENIVASAN ,  Roger QUON

IPC: G01N33/487 ,  C12Q1/6869 ,  B82Y15/00

Abstract: Embodiments of the present disclosure provide dual pore sensors and methods for producing these dual pore sensors. The method includes forming a film stack, where the film stack contains two silicon layers and two membrane layers, and then etching the film stack to produce a channel extending therethrough and having two reservoirs and two nanopores. The method also includes depositing a oxide layer on inner surfaces of the reservoirs and nanopores, depositing a dielectric layer on the oxide layer, and forming a metal contact extending through a portion of the stack. The method further includes etching the dielectric layers to form wells, etching the first silicon layer to reveal the protective oxide layer deposited on the inner surfaces of a reservoir, and etching the protective oxide layer deposited on the inner surfaces of the reservoirs and the nanopores.

公开(公告)号：US20220242725A1

公开(公告)日：2022-08-04

申请号：US17617151

申请日：2020-04-15

Applicant: Applied Materials, Inc.

Inventor： Joseph R. JOHNSON ,  Roger QUON ,  Archana KUMAR ,  Ryan Scott SMITH ,  Jeremiah HEBDING ,  Raghav SREENIVASAN

IPC: B82B3/00 ,  B81C1/00 ,  B82Y15/00 ,  B82Y40/00

Abstract: Embodiments of the present disclosure provide methods of forming solid state dual pore sensors which may be used for biopolymer sequencing and dual pore sensors formed therefrom. In one embodiment, a method of forming a dual pore sensor includes providing a pattern in a surface of a substrate. Generally, the pattern features two fluid reservoirs separated by a divider wall. The method further includes depositing a layer of sacrificial material into the two fluid reservoirs, depositing a membrane layer, patterning two nanopores through the membrane layer, removing the sacrificial material from the two fluid reservoirs, and patterning one or more fluid ports and a common chamber.

公开(公告)号：US20220016628A1

公开(公告)日：2022-01-20

申请号：US16933597

申请日：2020-07-20

Applicant: Applied Materials, Inc.

Inventor： Ryan Scott SMITH ,  Roger QUON ,  David COLLINS ,  George ODLUM ,  Raghav SREENIVASAN ,  Joseph R. JOHNSON

IPC: B01L3/00 ,  B82B1/00 ,  B82B3/00 ,  G01N27/447 ,  G01N27/40 ,  G01N33/487

Abstract: Embodiments of the present disclosure provide nanopore devices, such as nanopore sensors and/or other nanofluidic devices. In one or more embodiments, a nanopore device contains a substrate, an optional lower protective oxide layer disposed on the substrate, a membrane disposed on the lower protective oxide layer, and an optional upper protective oxide layer disposed on the membrane. The membrane has a pore and contains silicon nitride. The silicon nitride has a nitrogen to silicon ratio of about 0.98 to about 1.02 and the membrane has an intrinsic stress value of about −1,000 MPa to about 1,000 MPa. The nanopore device also contains a channel extending through at least the substrate, the lower protective oxide layer, the membrane, the upper protective oxide layer, and the upper protective silicon nitride layer.

公开(公告)号：US20220236250A1

公开(公告)日：2022-07-28

申请号：US17617153

申请日：2020-04-15

Applicant: Applied Materials, Inc.

Inventor： Joseph R. JOHNSON ,  Roger QUON ,  Archana KUMAR ,  Ryan Scott SMITH ,  Jeremiah HEBDING ,  Raghav SREENIVASAN

IPC: G01N33/487

Abstract: Embodiments of the present disclosure provide methods of forming solid state dual pore sensors which may be used for biopolymer sequencing and dual pore sensors formed therefrom. In one embodiment, a dual pore sensor features a substrate having a patterned surface comprising two recessed regions spaced apart by a divider wall and a membrane layer disposed on the patterned surface. The membrane layer, the divider wall, and one or more surfaces of each of the two recessed regions collectively define a first fluid reservoir and a second fluid reservoir. A first nanopore is disposed through a portion of the membrane layer disposed over the first fluid reservoir and a second nanopore is disposed through a portion of the membrane layer disposed over the second fluid reservoir. Herein, opposing surfaces of the divider wall are sloped to each form an angle of less than 90° with a respective reservoir facing surface of the membrane layer.