Invention Application
- Patent Title: MEMORY DEVICE AND METHOD OF CONTROLLING MEMORY DEVICE
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Application No.: US17477117Application Date: 2021-09-16
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Publication No.: US20220246633A1Publication Date: 2022-08-04
- Inventor: Fumitaka ARAI
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2021-015252 20210202
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/11551 ; H01L27/11529 ; H01L27/11573 ; G11C16/04 ; G11C16/08 ; G11C16/10 ; G11C16/24 ; G11C16/26 ; G11C16/34 ; G11C11/56

Abstract:
According to one embodiment, a memory device includes: first and second stacks each including a first semiconductor layers arranged in a first direction perpendicular to a surface of a substrate, the first and second stacks arranged in a second direction parallel to the surface of the substrate; a second semiconductor layer above the first stack in the first direction; a third semiconductor layer above the second stack in the first direction; memory cells between the first semiconductor layers and the word lines; a first transistor on the second semiconductor layer; and a second transistor on the third semiconductor layer. The first and second stacks are arranged at a first pitch, the first and second semiconductor layers are arranged at a second pitch equal to the first pitch.
Public/Granted literature
- US11849580B2 Memory device and method of controlling memory device Public/Granted day:2023-12-19
Information query
IPC分类: