Invention Application
- Patent Title: FLUID RECOVERY IN SEMICONDUCTOR PROCESSING
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Application No.: US17735464Application Date: 2022-05-03
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Publication No.: US20220259756A1Publication Date: 2022-08-18
- Inventor: Sam Lee , Kyle M. Hanson , Eric J. Bergman
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C25D21/08
- IPC: C25D21/08 ; H01L21/02 ; H01L21/67 ; C25D17/00

Abstract:
Exemplary electroplating apparatuses may include a system head operable to clamp a substrate. The system head may be operable to raise and lower the substrate between a plating bath, a first position above the plating bath, and a second position above the first position. The electroplating apparatuses may include a plating bath vessel adapted to hold the plating bath for electroplating on the substrate. The electroplating apparatuses may include a weir extending about the plating bath vessel. The electroplating apparatuses may include a first nozzle extending through the weir at a first radial position, and positioned to deliver fluid to the substrate at the first position above the plating bath. The electroplating apparatuses may include a second nozzle extending through the weir at a second radial position, and positioned to deliver fluid to the substrate at the second position above the plating bath.
Public/Granted literature
- US11788200B2 Fluid recovery in semiconductor processing Public/Granted day:2023-10-17
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