Invention Application
- Patent Title: SUBSTRATE TREATMENT DEVICE
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Application No.: US17665657Application Date: 2022-02-07
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Publication No.: US20220270914A1Publication Date: 2022-08-25
- Inventor: Masaya KAMIYA , Kensuke DEMURA
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Yokohama-shi
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Yokohama-shi
- Priority: JP2021-028248 20210225,JP2022-001464 20220107
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67

Abstract:
A substrate treatment device according to an embodiment includes a placement part that includes a placement platform on which a substrate is placeable and that is configured to rotate the placed substrate, a cooling nozzle configured to supply a cooling gas to a space between the placement platform and the substrate, a liquid supplier configured to supply a liquid to a surface of the substrate opposite to the placement platform side, and a dispersion plate located at a discharge side of the cooling gas of the cooling nozzle. The dispersion plate includes a first hole extending through the dispersion plate in a thickness direction. The first hole is located at a position overlapping a central axis of the cooling nozzle when viewed along a direction along the central axis of the cooling nozzle.
Public/Granted literature
- US12074055B2 Substrate treatment device Public/Granted day:2024-08-27
Information query
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