Invention Application
- Patent Title: TRANSFER SYSTEM, TRANSFER DEVICE, AND TRANSFER METHOD
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Application No.: US17680296Application Date: 2022-02-25
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Publication No.: US20220277981A1Publication Date: 2022-09-01
- Inventor: Norihiko AMIKURA , Toshiaki TOYOMAKI , Masatomo KITA
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP2021-030806 20210226,JP2021-095292 20210607,JP2021-114080 20210709,JP2021-211397 20211224
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/687 ; H01J37/32 ; B25J11/00 ; B25J13/08 ; B25J9/16

Abstract:
According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.
Public/Granted literature
- US12131937B2 Transfer system, transfer device, and transfer method Public/Granted day:2024-10-29
Information query
IPC分类: