公开(公告)号：US20240186158A1

公开(公告)日：2024-06-06

申请号：US18525930

申请日：2023-12-01

Applicant: Tokyo Electron Limited

Inventor： Norihiko AMIKURA ,  Makoto SAEGUSA ,  Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masatomo KITA

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67196 ,  H01L21/67184 ,  H01L21/67742

Abstract: The present disclosure provides a transfer module, comprising: a first transfer chamber; a second transfer chamber, the second transfer chamber capable of accommodating a container accommodating a plurality of objects; and an opening/closing door configured to partition the first transfer chamber and the second transfer chamber, wherein the first transfer chamber has an accommodation portion configured to accommodate the object to be carried into the second transfer chamber, and the container accommodating the plurality of objects is carried into the second transfer chamber, the plurality of objects are transferred from the container to the accommodation portion in the first transfer chamber, the object is transferred from the accommodation portion into the vacuum transfer module, and the object carried out from the vacuum transfer module is transferred into the container without passing through the accommodation portion.

公开(公告)号：US20200251372A1

公开(公告)日：2020-08-06

申请号：US16782495

申请日：2020-02-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE

IPC: H01L21/683 ,  H01L21/02 ,  H01L21/3065 ,  H05H1/00

Abstract: A carrier includes a jig and a case. The jig is configured to hold at least one consumable to be loaded into or unloaded from a container. The case is configured to store the jig and the consumable held by the jig.

公开(公告)号：US20220277981A1

公开(公告)日：2022-09-01

申请号：US17680296

申请日：2022-02-25

Applicant: Tokyo Electron Limited

Inventor： Norihiko AMIKURA ,  Toshiaki TOYOMAKI ,  Masatomo KITA

IPC: H01L21/68 ,  H01L21/687 ,  H01J37/32 ,  B25J11/00 ,  B25J13/08 ,  B25J9/16

Abstract: According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.

公开(公告)号：US20210280447A1

公开(公告)日：2021-09-09

申请号：US17187299

申请日：2021-02-26

Applicant: TOKYO ELECTRON LIMITED

Inventor： Norihiko AMIKURA ,  Toshiaki TOYOMAKI

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687 ,  H01L21/68 ,  B65G47/90

Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.

公开(公告)号：US20240379392A1

公开(公告)日：2024-11-14

申请号：US18657802

申请日：2024-05-08

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI

IPC: H01L21/67 ,  H01L21/687

Abstract: Provided is a processing system comprising: a transfer module having therein a transfer device configured to transfer an object to be transferred; a plurality of load-lock modules connected to the transfer module, each having therein a support; a detection part disposed in the transfer device and the plurality of load-lock modules and detecting an object; and a controller configured to process a detection result and control an operation of the transfer device, wherein the controller controls: (A) acquiring information on positions of the supports in the plurality of load-lock modules from a detection result of the object detected by the detection part; and (B) calculating, after said (A), tilt angles of the plurality of load-lock modules with respect to the transfer module based on the acquired information on the positions of the plurality of supports, and setting the positions of the plurality of supports using the calculated tilt angles.

公开(公告)号：US20240182252A1

公开(公告)日：2024-06-06

申请号：US18525935

申请日：2023-12-01

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI ,  Norihiko AMIKURA ,  Seiichi KAISE ,  Masatomo KITA

IPC: B65G47/90

CPC classification number: B65G47/904 ,  B65G2201/0297

Abstract: There is a transfer module comprising: a housing; a load port disposed on a sidewall of the housing, the load port being capable of placing a container accommodating multiple objects to be transferred; a transfer device disposed in the housing and configured to transfer the objects; and a storage unit disposed in the housing and configured to temporarily accommodate the objects, wherein the housing includes: a first sidewall to which a load-lock module is connected; and a second sidewall other than a sidewall facing the first sidewall, to which the load port is connected, wherein the transfer device has a first arm having multiple forks on which the objects are placed, and the transfer device collectively transfers the objects in the container placed on the load port into the storage unit using the first arm.

公开(公告)号：US20230282492A1

公开(公告)日：2023-09-07

申请号：US18197455

申请日：2023-05-15

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI

IPC: H01L21/67 ,  H01L21/3065 ,  H01J37/305

CPC classification number: H01L21/67069 ,  H01L21/67155 ,  H01L21/67196 ,  H01L21/3065 ,  H01L21/67184 ,  H01L21/67173 ,  H01J37/305

Abstract: A substrate processing system includes a first substrate processing chamber, a first substrate transfer chamber connected to the first substrate processing chamber, a second substrate processing chamber, and a second substrate transfer chamber connected to the second substrate processing chamber. The substrate processing system further includes a buffer chamber connected between the first substrate transfer chamber and the second substrate transfer chamber, the buffer chamber having at least one substrate holder. At least a part of the buffer chamber and at least one of the first substrate transfer chamber or the second substrate transfer chamber are vertically overlapped with each other.

公开(公告)号：US20220093438A1

公开(公告)日：2022-03-24

申请号：US17542249

申请日：2021-12-03

Applicant: TOKYO ELECTRON LIMITED

Inventor： Norihiko AMIKURA ,  Toshiaki TOYOMAKI

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  B65G47/90 ,  H01L21/687

Abstract: A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.

公开(公告)号：US20250069940A1

公开(公告)日：2025-02-27

申请号：US18946976

申请日：2024-11-14

Applicant: Tokyo Electron Limited

Inventor： Norihiko AMIKURA ,  Masatomo KITA ,  Masahiro DOGOME ,  Takami FUKASAWA ,  Daisuke HAYASHI ,  Toshiaki TOYOMAKI

IPC: H01L21/687 ,  B25J11/00 ,  H01L21/683

Abstract: A transfer device for simultaneously or separately transferring a wafer and a consumable part having a circular shape is disclosed. The consumable part is disposed in a wafer processing module, and the outer diameter of the consumable part is larger than the outer diameter of the wafer. The transfer device comprises an end effector configured to place the wafer and the consumable part thereon simultaneously or separately, an arm configured to move the end effector, and a controller configured to control the arm, to place the consumable part on the end effector such that the center of gravity of the consumable part coincides with a first position when transferring the consumable part, and to place the wafer on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and front ends of the end effector when transferring the wafer.

公开(公告)号：US20230365351A1

公开(公告)日：2023-11-16

申请号：US18197525

申请日：2023-05-15

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI

IPC: B65G47/91 ,  B65G43/00

CPC classification number: B65G47/917 ,  B65G43/00 ,  B65G2203/0283

Abstract: There is an abnormality detection method for a transfer device including an arm having a substrate holder to hold a substrate, an elevating mechanism to raise and lower the arm, a position detector to detect a position of the substrate holder, a suction hole formed at the substrate holder, and a pressure detector to detect a pressure of a suction passage communicating with the suction hole, the method comprising: controlling the arm to move the substrate holder to a position below the substrate; controlling the elevating mechanism to raise the arm and the substrate holder; detecting contact between the substrate and the substrate holder based on a pressure change detected by the pressure detector; detecting, by using the position detector, a position of the substrate holder at the time of detecting the contact; and detecting an abnormal state of the transfer device based on the detected position.