Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE INCLUDING DISCRETE CHARGE STORAGE ELEMENTS WITH LATERALLY-PROTRUDING PROFILES AND METHODS OF MAKING THEREOF
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Application No.: US17192463Application Date: 2021-03-04
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Publication No.: US20220285386A1Publication Date: 2022-09-08
- Inventor: Ramy Nashed Bassely SAID , Raghuveer S. MAKALA , Senaka KANAKAMEDALA , Fei ZHOU
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11519 ; H01L27/11524 ; H01L27/1157 ; H01L27/11565

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings vertically extending through the alternating stack and having lateral protrusions at levels of the electrically conductive layers, and memory opening fill structures located in the memory openings. Each of the memory opening fill structures includes a vertical semiconductor channel, a dielectric material liner laterally surrounding the vertical semiconductor channel, and a vertical stack of discrete memory elements laterally surrounding the dielectric material liner and located within volumes of the lateral protrusions. Each discrete memory element includes a vertical inner sidewall and a convex or stepped outer sidewall.
Public/Granted literature
Information query
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