- 专利标题: METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING
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申请号: US17804419申请日: 2022-05-27
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公开(公告)号: US20220290286A1公开(公告)日: 2022-09-15
- 发明人: Sass Somekh , Eliyahu Vronsky , Conor F. Madigan
- 申请人: Kateeva, Inc.
- 申请人地址: US CA Newark
- 专利权人: Kateeva, Inc.
- 当前专利权人: Kateeva, Inc.
- 当前专利权人地址: US CA Newark
- 主分类号: C23C4/137
- IPC分类号: C23C4/137 ; B41J2/14 ; B41J11/00 ; B41J29/393 ; B41M5/00 ; H01L21/677 ; H01L21/67 ; B05B17/00 ; H05B33/10 ; H01L33/00 ; B41J2/015 ; B05C5/02 ; B05C13/02 ; B41J2/165 ; B41J2/315
摘要:
The disclosure relates to a method and apparatus for preventing oxidation or contamination during a circuit printing operation. The circuit printing operation can be directed to OLED-type printing. In an exemplary embodiment, the printing process is conducted at a load-locked printer housing having one or more of chambers. Each chamber is partitioned from the other chambers by physical gates or fluidic curtains. A controller coordinates transportation of a substrate through the system and purges the system by timely opening appropriate gates. The controller may also control the printing operation by energizing the print-head at a time when the substrate is positioned substantially thereunder.