Invention Application
- Patent Title: SILICON PHOTONICS-BASED PHOTODETECTOR
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Application No.: US17540439Application Date: 2021-12-02
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Publication No.: US20220308285A1Publication Date: 2022-09-29
- Inventor: Dongjun SEO , Heuk PARK , Sanghwa YOO , Joon Ki LEE
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2021-0037772 20210324
- Main IPC: G02B6/12
- IPC: G02B6/12 ; H01L31/0232 ; H01L31/028 ; H01L31/105

Abstract:
A silicon photonics-based photodetector (PD) includes a silicon layer on which doped layers of different types are formed on a surface based on a first spacing based on a center line of an optical waveguide through which an optical signal moves, a germanium layer being stacked on an upper part of the silicon layer and formed with doped layers of different types on a surface based on a second spacing based on the center line of the optical waveguide, and a metal electrode configured to generate an electric field by being in contact with the doped layers of the silicon layer and the germanium layer.
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