- 专利标题： PAD CONDITIONER CLEANING SYSTEM
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申请号： US17849576申请日： 2022-06-24
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公开(公告)号： US20220314397A1公开(公告)日： 2022-10-06
- 发明人: Shantanu Rajiv Gadgil , Sumit Subhash Patankar , Nathan Arron Davis , Michael J. Coughlin , Allen L. D`Ambra
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B24B53/017
- IPC分类号： B24B53/017
摘要：
A method of cleaning a conditioner head includes bringing two clamps of a cleaning tool inward toward a disk-shaped pad conditioner head to press a sponge against an outer surface of the disk-shaped pad conditioner head, and creating relative motion between the cleaning tool and the pad conditioner head to wipe the sponge against the pad conditioner head.
公开/授权文献
- US11648645B2 Pad conditioner cleaning system 公开/授权日：2023-05-16
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