Invention Application
- Patent Title: SENSOR IN AN INTERNET-OF-THINGS
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Application No.: US17844080Application Date: 2022-06-20
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Publication No.: US20220333251A1Publication Date: 2022-10-20
- Inventor: MING-TA LEI , CHIA-HUA CHU , HSIN-CHIH CHIANG , TUNG-TSUN CHEN , CHUN-WEN CHENG
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW HSINCHU
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW HSINCHU
- Main IPC: C23F4/00
- IPC: C23F4/00 ; G01N27/12 ; G01N33/00

Abstract:
The present disclosure provides a gas sensor. The gas sensor includes a substrate, a conductor layer over the substrate, wherein the conductor layer includes a conductive pattern including a plurality of openings, the openings being arranged in a repeating pattern, an insulating layer in the plurality of openings and over a top surface of the conductive pattern, wherein the conductive pattern is embedded in the insulating layer, and a gas sensing film over a portion of the insulating layer.
Public/Granted literature
- US11987891B2 Sensor in an internet-of-things Public/Granted day:2024-05-21
Information query
IPC分类: