- 专利标题: LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
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申请号: US17620952申请日: 2020-05-26
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公开(公告)号: US20220336657A1公开(公告)日: 2022-10-20
- 发明人: Zhili ZHANG , Jingchuan ZHAO , Sen ZHANG
- 申请人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 申请人地址: CN Wuxi New District, Jiangsu
- 专利权人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 当前专利权人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 当前专利权人地址: CN Wuxi New District, Jiangsu
- 优先权: CN201910874283.5 20190917
- 国际申请: PCT/CN2020/092270 WO 20200526
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/10 ; H01L29/66 ; H01L29/40
摘要:
A laterally diffused metal-oxide-semiconductor (LDMOS) device and a method of manufacturing the LDMOS device are disclosed. The method includes: obtaining a substrate with a drift region formed thereon, the drift region having a first conductivity type and disposed on the substrate of a second conductivity type; etching the drift region to form therein a sinking structure, the sinking structure includes at least one of an implanting groove and an implanting hole; implanting ions of the second conductivity type at the bottom of the sinking structure; forming a buried layer of the second conductivity type by causing diffusion of the ions of the second conductivity type using a thermal treatment; and filling an electrical property modification material into the sinking structure, the electrical property modification material differs from the material of the drift region.
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