- 专利标题: SEMICONDUCTOR LASER ELEMENT, METHOD FOR MANUFACTURING SAME, AND SEMICONDUCTOR LASER DEVICE
-
申请号: US17641164申请日: 2019-12-04
-
公开(公告)号: US20220344893A1公开(公告)日: 2022-10-27
- 发明人: Chikara WATATANI , Motoharu MIYASHITA , Takehiro NISHIDA
- 申请人: Mitsubishi Electric Corporation
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 国际申请: PCT/JP2019/047331 WO 20191204
- 主分类号: H01S5/0237
- IPC分类号: H01S5/0237 ; H01S5/0234 ; H01S5/22 ; H01S5/042
摘要:
Provided here are: semiconductor layers comprised of an n-type cladding layer formed on a surface of an n-type GaAs substrate, active layers formed on surfaces of the n-type cladding layer, p-type cladding layers formed on surfaces of the active layers, and p-type contact layers formed on surfaces of the p-type cladding layers, the p-type cladding layers and the p-type contact layers being formed to have a ridges; insulating films covering surfaces of the semiconductor layers but having openings on surfaces of the p-type contact layer; and conductive layers connected to the p-type contact layers through the openings, the conductive layers being formed on surfaces of the insulating films to cover planar portions provided in the semiconductor layers adjacently to the ridges; wherein, together with the conductive layers, convex sidewalls are provided to be placed over portions of the planar portions at their sides nearer to the ridges.
信息查询