Invention Application
- Patent Title: RESONANT PRESSURE SENSOR
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Application No.: US17854209Application Date: 2022-06-30
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Publication No.: US20220349766A1Publication Date: 2022-11-03
- Inventor: Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
- Applicant: YOKOGAWA ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2020-002784 20200110
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A resonant pressure sensor includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that comprises: a substrate-fixed portion that is fixed to the housing-fixed portion; and a substrate-separated portion that is separated from the housing-fixed portion in a first direction and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a first electrode that extends along a second direction perpendicular to the first direction and that outputs an excitation signal to the first resonator to excite the first resonator; and a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency.
Public/Granted literature
- US11592347B2 Resonant pressure sensor with imporved linearity Public/Granted day:2023-02-28
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