Invention Application
- Patent Title: APPARATUS AND METHOD FOR TREATING SUBSTRATE
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Application No.: US17732691Application Date: 2022-04-29
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Publication No.: US20220355344A1Publication Date: 2022-11-10
- Inventor: Hyun Seok Choi , Ki Young Kwak , Dong Hee Son , Jong Hwan Park , Jong Jin Jung
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR10-2021-0057914 20210504
- Main IPC: B08B3/02
- IPC: B08B3/02 ; G03F7/42

Abstract:
An apparatus and method for treating a substrate that implement a recipe capable of increasing an absorption amount of metal ions to the substrate are provided. The method for treating the substrate includes: ejecting a substrate treating liquid onto the substrate; rotating the substrate at a first low-speed; and when the ejecting of the substrate treating liquid has been finished, drying the substrate.
Information query
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