Invention Application
- Patent Title: ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHODS THEREFOR
-
Application No.: US17307216Application Date: 2021-05-04
-
Publication No.: US20220356028A1Publication Date: 2022-11-10
- Inventor: Andreas SAUER , Annemarie HLADIK , Bernhard KÖHLER , Thomas DEPPISCH , Claire ARMSTRONG , Wolfgang BUSCHBECK
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B65H27/00
- IPC: B65H27/00 ; B65H18/14 ; B65H23/038
Abstract:
A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets extending in a radial direction (R) and being provided above the plurality of gas supply slits.
Information query
