公开(公告)号：US20200332413A1

公开(公告)日：2020-10-22

申请号：US16759696

申请日：2017-11-16

Applicant: Applied Materials, Inc.

Inventor： Claire ARMSTRONG ,  Frank SCHNAPPENBERGER ,  Thomas DEPPISCH

IPC: C23C14/54 ,  C23C14/24

Abstract: A method (100) of cooling a deposition source (200) is described. The method includes stopping (110) depositing material from the deposition source, the deposition source being arranged in a deposition chamber (250), and introducing (120) a cooling gas into the deposition chamber (250), the cooling gas comprising a thermal conductivity λ of λ≥0.05 [W/(m*K)]. Further, a chamber for cooling a deposition source is described. The chamber includes a deposition source being arranged in the chamber. Further, the chamber includes a cooling gas supply system configured for providing a cooling gas into the chamber, the cooling gas comprising a thermal conductivity λ of λ≥0.05 [W/(m*K)].

公开(公告)号：US20220356028A1

公开(公告)日：2022-11-10

申请号：US17307216

申请日：2021-05-04

Applicant: Applied Materials, Inc.

Inventor： Andreas SAUER ,  Annemarie HLADIK ,  Bernhard KÖHLER ,  Thomas DEPPISCH ,  Claire ARMSTRONG ,  Wolfgang BUSCHBECK

IPC: B65H27/00 ,  B65H18/14 ,  B65H23/038

Abstract: A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets extending in a radial direction (R) and being provided above the plurality of gas supply slits.

公开(公告)号：US20220356027A1

公开(公告)日：2022-11-10

申请号：US17307195

申请日：2021-05-04

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Stefan BANGERT ,  Claire ARMSTRONG ,  Frank SCHNAPPENBERGER

IPC: B65H27/00 ,  C23C14/56 ,  C23C16/54 ,  B23K26/382 ,  B65H20/02

Abstract: A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets being provided above the plurality of gas supply slits. Further, the sleeve includes a metal layer embedded within isolating material.