VACUUM PUMP AND ELECTROMAGNET UNIT USED FOR VACUUM PUMP
Abstract:
An electromagnet unit in which influence of a noise on a displacement sensor is suppressed and which can be installed in a space-saving manner and a vacuum pump including the electromagnet unit are provided. An electromagnet unit includes a radial electromagnet which controls a shaft to a predetermined position, a radial sensor which detects a position of the shaft, and a printed board interposed between the radial electromagnet and the radial sensor and on which a wiring pattern for sensor connecting coils of the corresponding two radial sensors to each other and a wiring pattern connecting coils of the corresponding two radial electromagnets to each other are provided. The wiring pattern for sensor and the wiring pattern for electromagnet are disposed so as not to overlap when seen from the axial direction.
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