Invention Application
- Patent Title: GATE STRUCTURES FOR SEMICONDUCTOR DEVICES
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Application No.: US17320170Application Date: 2021-05-13
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Publication No.: US20220367627A1Publication Date: 2022-11-17
- Inventor: Chansyun David YANG , Keh-Jeng CHANG , Chan-Lon YANG , Perng-Fei YUH
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/66 ; H01L29/78 ; H01L21/8234

Abstract:
A semiconductor device with different configurations of gate structures and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes a stack of nanostructured channel regions disposed on a fin structure, a first gate structure disposed within the stack of nanostructured channel regions, a second gate structure surrounds the first gate structure about a first axis and surrounds the nanostructured channel regions about a second axis different from the first axis, and first and second contact structures disposed on the first and second gate structures, respectively.
Public/Granted literature
- US12027583B2 Gate structures for semiconductor devices Public/Granted day:2024-07-02
Information query
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