Invention Application
- Patent Title: INTEGRATION OF SELECTOR ON CONFINED PHASE CHANGE MEMORY
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Application No.: US17876237Application Date: 2022-07-28
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Publication No.: US20220367797A1Publication Date: 2022-11-17
- Inventor: Wanki Kim , Fabio Carta , Chung H. Lam , Robert L. Bruce
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method for fabricating a semiconductor device includes forming air gaps within respective dielectric layer portions to reduce thermal cross-talk between adjacent bits. Each of the dielectric portions is formed on a substrate each adjacent to sidewall liners formed on sidewalls of a phase change memory (PCM) layer. The method further includes forming a pillar including the sidewall liners and the PCM layer, and forming a selector layer on the pillar and the dielectric portions.
Public/Granted literature
- US11968913B2 Integration of selector on confined phase change memory Public/Granted day:2024-04-23
Information query
IPC分类: