Invention Application
- Patent Title: SUBSTRATE TREATING CONTROL METHOD, SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING METHOD AND COMPUTER PROGRAM STORED IN COMPUTER READABLE MEDIUM FOR TREATING SUBSTRATE
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Application No.: US17746350Application Date: 2022-05-17
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Publication No.: US20220371321A1Publication Date: 2022-11-24
- Inventor: Sang Hoon KIM , Jae Hun JEONG
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR10-2021-0063981 20210518
- Main IPC: B41J2/045
- IPC: B41J2/045

Abstract:
The inventive concept provides a substrate treating control method. The substrate treating control method includes discharging a droplet to a substrate in which a relative position to the head unit changes from a nozzle of a head unit, and wherein a correction value is applied at a discharge timing of the nozzle until a preset discharge cycle among a discharge cycle of the droplet discharged by the nozzle.
Information query
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