• Patent Title: SUBSTRATE TREATING CONTROL METHOD, SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING METHOD AND COMPUTER PROGRAM STORED IN COMPUTER READABLE MEDIUM FOR TREATING SUBSTRATE
  • Application No.: US17746350
    Application Date: 2022-05-17
  • Publication No.: US20220371321A1
    Publication Date: 2022-11-24
  • Inventor: Sang Hoon KIMJae Hun JEONG
  • Applicant: SEMES CO., LTD.
  • Applicant Address: KR Cheonan-si
  • Assignee: SEMES CO., LTD.
  • Current Assignee: SEMES CO., LTD.
  • Current Assignee Address: KR Cheonan-si
  • Priority: KR10-2021-0063981 20210518
  • Main IPC: B41J2/045
  • IPC: B41J2/045
SUBSTRATE TREATING CONTROL METHOD, SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING METHOD AND COMPUTER PROGRAM STORED IN COMPUTER READABLE MEDIUM FOR TREATING SUBSTRATE
Abstract:
The inventive concept provides a substrate treating control method. The substrate treating control method includes discharging a droplet to a substrate in which a relative position to the head unit changes from a nozzle of a head unit, and wherein a correction value is applied at a discharge timing of the nozzle until a preset discharge cycle among a discharge cycle of the droplet discharged by the nozzle.
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