公开(公告)号：US20230338997A1

公开(公告)日：2023-10-26

申请号：US18105883

申请日：2023-02-06

Applicant: SEMES CO., LTD.

Inventor： Jae Hun JEONG ,  Cheol Yong SHIN ,  Wan Hee JEONG ,  Do Youn LIM

IPC: B08B11/02 ,  B08B3/02 ,  B08B3/08

CPC classification number: B08B11/02 ,  B08B3/02 ,  B08B3/08

Abstract: A support structure, includes: a support plate supporting a substrate; a lower cover covering a lower portion of the support plate; and a catching unit comprising a concave-convex structure having portions corresponding to each other so that the support plate and the lower cover are rotated and assembled with each other.

公开(公告)号：US20220371321A1

公开(公告)日：2022-11-24

申请号：US17746350

申请日：2022-05-17

Applicant: SEMES CO., LTD.

Inventor： Sang Hoon KIM ,  Jae Hun JEONG

IPC: B41J2/045

Abstract: The inventive concept provides a substrate treating control method. The substrate treating control method includes discharging a droplet to a substrate in which a relative position to the head unit changes from a nozzle of a head unit, and wherein a correction value is applied at a discharge timing of the nozzle until a preset discharge cycle among a discharge cycle of the droplet discharged by the nozzle.

公开(公告)号：US20220153030A1

公开(公告)日：2022-05-19

申请号：US17529323

申请日：2021-11-18

Applicant: SEMES CO., LTD.

Inventor： Byung Joo LEE ,  Sang Hwa LEE ,  Dong Yun LEE ,  Jee Yong JUNG ,  Hahn Seok JEON ,  Kang KWON ,  Jae Hun JEONG ,  Sang Hoon KIM

IPC: B41J2/165

Abstract: The present invention provides an apparatus for treating a substrate, the apparatus including: a head unit including a head formed with one or more nozzles that discharge a treatment liquid to a substrate; and a head maintenance unit configured to perform maintenance for the head, in which the head maintenance unit may include: a liquid receiving block formed with one or more liquid receiving parts having liquid receiving spaces with open tops; a decompression line fluidly-communicating with the liquid receiving space and configured to provide reduced pressure to the liquid receiving space; and a decompression valve installed in the decompression line.