Invention Application
- Patent Title: COMPOSITIONS AND METHODS FOR TUNGSTEN ETCHING INHIBITION
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Application No.: US17633228Application Date: 2020-08-04
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Publication No.: US20220372632A1Publication Date: 2022-11-24
- Inventor: Michael LAUTER , Haci Osman GUEVENC , Te Yu WEI , Ching Hsun CHAO
- Applicant: BASF SE
- Applicant Address: DE Ludwigshafen am Rhein
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: DE Ludwigshafen am Rhein
- Priority: EP19190905.0 20190908
- International Application: PCT/EP2020/071890 WO 20200804
- Main IPC: C23F11/173
- IPC: C23F11/173 ; C22C27/04 ; H01L21/321
Abstract:
The presently claimed invention relates to compositions and methods for inhibition of etching. The presently claimed invention particularly relates to a composition and methods for inhibition of tungsten etching.
Information query
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